Fabrication of a Highly Sensitive Chemical Sensor Based on ZnO Nanorod Arrays
نویسندگان
چکیده
We report a novel method for fabricating a highly sensitive chemical sensor based on a ZnO nanorod array that is epitaxially grown on a Pt-coated Si substrate, with a top-top electrode configuration. To practically test the device, its O(2) and NO(2) sensing properties were investigated. The gas sensing properties of this type of device suggest that the approach is promising for the fabrication of sensitive and reliable nanorod chemical sensors.
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